Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current.
نویسندگان
چکیده
We present a compact 1.3 × 4 μm2 Germanium waveguide photodiode, integrated in a CMOS compatible silicon photonics process flow. This photodiode has a best-in-class 3 dB cutoff frequency of 45 GHz, responsivity of 0.8 A/W and dark current of 3 nA. The low intrinsic capacitance of this device may enable the elimination of transimpedance amplifiers in future optical data communication receivers, creating ultra low power consumption optical communications.
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عنوان ژورنال:
- Optics express
دوره 19 25 شماره
صفحات -
تاریخ انتشار 2011